Feasibility Study of Inherently Safer Design Strategies in High-Tech FAB: Establishing an Inherently Safter Application Model

• Main Authors: kuo-chi Chang, 張國基
• Other Authors: Chun-Yu Chen
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/42011580022173208161

碩士 === 國立交通大學 === 工學院碩士在職專班產業安全與防災組 === 96 === High-tech industries, such as those producing semi-conductor and TFT-LCD (Thin Film Transistor Liquid Crystal Display), have recently become the most important economic activities in Taiwan. Each of these industries has a complete chain of supply from raw material production, production preprocessing, product manufacturing, to waste handling. Any company in the chain is a critical component, since any accidents of fire, explosion, gas leakage, or power outage would cut off the supply chain, causing inability of continuous operation. In industries of semi-conductor and TFT-LCD, great amounts of special gases and chemicals with many machinery equipments are used in the production processes. In cases of accidents or improper installation, these chain of supply, from raw material production, preproduction, product manufacturing, to waste handling materials and equipments may cause severe damages or incidents. In this study, strategies of Inherently Safer Design are explored, which include intensification, substitution, attenuation, limitation of effects, simplification, knock-on effect avoidance, incorrect assembly elimination, clear status, tolerance, ease of control, software, and so on. The purpose of the survey is to understand the function and value of inherently safer design and the essence of the strategies. Through the two phases of experiment and practical application evaluation, the feasibilities of inherently safer design strategies in facilities of high-tech industries are discussed in detail. It is concluded that the strategies not only can maintain existing YE, but also can enhance safety in production processes, equipments, and FAB. Such improvements prevent hazards such as fire, explosion, mechanical injuries, poisoning and corroding from leaks, so as to allow high-tech industries to grow in stable and safe conditions.