| Summary: | 碩士 === 國立中山大學 === 電機工程學系研究所 === 96 === The Diamond-like Carbon (DLC) films have numerous extraordinary advantages, such as high hardness, low friction factor, strong chemical stability, and high insulation properties for satisfying significant application in the industrial domain. In this study, DLC films are deposited by electrodeposition, which is different from the conventional technology of PVD and CVD. The methodology provides several advantages such as low voltage supply, low temperature electrodeposition, simple experimental steps and easy to operate, resulting in low costs. The experiment used ITO glass substrate covered with SnO2 as cathode, a thin graphite plate as anode, the voltage supply between the two poles is 2.1V ~ 50V, and the main components of electrolyte is the solution of acetic acid with deionized (DI) water. The property of Diamond-like Carbon films have been investigated to be associated with a variety of bias voltage, the concentration of acetic acid (electrolyte) during the process.
As a result, the deposition rate and hardness of Diamond-like Carbon films increase with the bias voltage. However, the surface roughness tends to decrease, and the same outcomes manifested when the concentration of electrolyte increased. For the analysis of Raman Spectrum, the D peak and G peak were at 1350cm-1 and 1580cm-1 individually, which demonstrated the existence of Diamond-like Carbon films. Finally, of analyzing the SEM and AFM photograph, the surface morphology of Diamond-like Carbon films are used to correlate the deposited parameters for obtaining the best quality of DLC films.
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