Dispatching Rules with Queue-Time-Limit Consideration for Furnace in Wafer Fabrication Factory
碩士 === 國立清華大學 === 工業工程與工程管理學系工程碩士在職專班 === 96 === To avoid wafer contamination in semiconductor manufacturing, some process steps have to set up “queue-time-limit” to keep line yield, If a lot exceeds the queue-time-limit, quality issues will occur and the lot needs to be reworked or scrapped. The in...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/01338059918740277187 |