Molecular Dynamics Simulation of Thermoplastic Nanoimprint Lithography Process
碩士 === 國立清華大學 === 化學工程學系 === 96 ===
Main Authors: | Chang-Fu Chen, 陳長福 |
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Other Authors: | Rong-Yeu Chang |
Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/69556116483098869713 |
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