Characterization of Zn3N2 Prepared with reactive Sputtering
碩士 === 國立清華大學 === 材料科學工程學系 === 96 ===
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Online Access: | http://ndltd.ncl.edu.tw/handle/46q48n |
id |
ndltd-TW-096NTHU5159033 |
---|---|
record_format |
oai_dc |
spelling |
ndltd-TW-096NTHU51590332019-05-15T19:39:18Z http://ndltd.ncl.edu.tw/handle/46q48n Characterization of Zn3N2 Prepared with reactive Sputtering 使用磁控濺鍍法成長Zn3N2之材料特性分析 PEI-CHEN YANG 楊珮甄 碩士 國立清華大學 材料科學工程學系 96 JON-YIEW GAN 甘炯耀 學位論文 ; thesis 66 zh-TW |
collection |
NDLTD |
language |
zh-TW |
format |
Others
|
sources |
NDLTD |
description |
碩士 === 國立清華大學 === 材料科學工程學系 === 96 ===
|
author2 |
JON-YIEW GAN |
author_facet |
JON-YIEW GAN PEI-CHEN YANG 楊珮甄 |
author |
PEI-CHEN YANG 楊珮甄 |
spellingShingle |
PEI-CHEN YANG 楊珮甄 Characterization of Zn3N2 Prepared with reactive Sputtering |
author_sort |
PEI-CHEN YANG |
title |
Characterization of Zn3N2 Prepared with reactive Sputtering |
title_short |
Characterization of Zn3N2 Prepared with reactive Sputtering |
title_full |
Characterization of Zn3N2 Prepared with reactive Sputtering |
title_fullStr |
Characterization of Zn3N2 Prepared with reactive Sputtering |
title_full_unstemmed |
Characterization of Zn3N2 Prepared with reactive Sputtering |
title_sort |
characterization of zn3n2 prepared with reactive sputtering |
url |
http://ndltd.ncl.edu.tw/handle/46q48n |
work_keys_str_mv |
AT peichenyang characterizationofzn3n2preparedwithreactivesputtering AT yángpèizhēn characterizationofzn3n2preparedwithreactivesputtering AT peichenyang shǐyòngcíkòngjiàndùfǎchéngzhǎngzn3n2zhīcáiliàotèxìngfēnxī AT yángpèizhēn shǐyòngcíkòngjiàndùfǎchéngzhǎngzn3n2zhīcáiliàotèxìngfēnxī |
_version_ |
1719093604508499968 |