Study on The Microstructure and Properties of (AlCrTaTiZr)(CN) Thin Film
碩士 === 國立清華大學 === 材料科學工程學系 === 96 ===
Main Author: | 辜文柏 |
---|---|
Other Authors: | 林樹均 |
Format: | Others |
Language: | zh-TW |
Published: |
2008
|
Online Access: | http://ndltd.ncl.edu.tw/handle/06817965566511029862 |
Similar Items
-
On the Sputtering films of AlCrTaTiZr oxynitride
by: 林妙怡
Published: (2008) -
Diffusion Barrier Performance of AlCrTaTiZr/AlCrTaTiZr-N High-Entropy Alloy Films for Cu/Si Connect System
by: Chunxia Jiang, et al.
Published: (2020-02-01) -
Preparation and Mechanical Properties of Multicomponent (AlCrTaTiZr)NSix Coatings
by: Chia-Jung Chang, et al.
Published: (2012) -
Study on Adhesion and Wear Resistance of (AlCrTaTiZr)N
by: Weng, Chih-Hui, et al.
Published: (2007) -
Preparation and Diffusion Barrier Property of AlCrTaTiZr High-Entropy-Alloy Nitride Films
by: Ming-Ku Cheng, et al.