Metal induced lateral growth of Amorphous Si nanowires patterned by Nanocontact printing lithography
碩士 === 國立清華大學 === 電子工程研究所 === 96 === In this thesis, the object is to use aminosilane transferred on amorphous silicon as a hard mask to fabricate amorphous silicon nanowires by nano-contact printing technique and apply nickel induced lateral crystallization technique to fabricate poly Si nanowires....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66216243953130580831 |