Measurement of Neutral Gas Densities in the Inductively Coupled Plasma by Mass Spectrometer for Investigating the Neutral Gas Heating Effect
碩士 === 國立清華大學 === 工程與系統科學系 === 96 ===
Main Authors: | Shang-Wei Lin, 林上為 |
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Other Authors: | Tsang-Lang Lin |
Format: | Others |
Language: | zh-TW |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/47237825471209834200 |
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