The membrane probe card with Ni-Co array micro rods

• Main Authors: Jian-Ru Wu, 吳建儒
• Other Authors: Chen-Chou Lin
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/75762672452610412883

碩士 === 國立臺灣海洋大學 === 機械與機電工程學系 === 96 === The characteristics of the membrane probe card with Ni-Co micro- rods array are discussed with the fabrication, the mechanics of materials and the electricity. The fabrication of the membrane probe card with Ni-Co micro-rods array is an innovative method which combines the fabrication of the flexible printed circuit board with the electroplating. The loading on one Ni-Co micro-rod together with other polymer materials can be calculated by the mechanics of composite materials and the bulking theory. The critical loading and critical stress are 1.01×10-3 N and 0.79 MPa respectively. When a membrane probe card with 25 Ni-Co micro-rods are applied on a pad of (100×100)μm2, the total loading force cannot exceed 2.57 g, due to the buckle issue. The measured electric resistance is 4.15 Ω, it is similar to 3.92 Ω that is calculated by the electric resistance theory. The advantages of the membrane probe card with Ni-Co micro-rods array include miniaturization, multi-die under test, good elasticity and low cost. It improves the drawback of the conventional membrane probe card that cannot completely contact the pad of rough surface.