polysilicon nanometer Field Effect Transistor

• Main Authors: Shih-Chao Hsu, 徐士超
• Other Authors: Chih-Ting Lin
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/39883084869531574337

碩士 === 國立臺灣大學 === 電子工程學研究所 === 96 === Medicine progresses toward Diagnostics based on molecular marker, and highly specific therapies aimed at molecular targets, the necessity for high-throughput methods for the detection of biomolecule increases. Technology platform that provide diagnostics which is reliable, rapid, quantitative, low-cost and muti-channel identification of biomarkers. Disease could be found early. Early detection of cancer are treated with the greatest possibility of success. Due to lithography technology’s progressing, device’s dimension has decreased to nanometer. Recently nanowire has been proposed to detect proteins, DNA, ions…etc. Nanowire used to function as biosensor had been showed, which was made either by CVD(chemical vapor deposition) or by using SOI(silicon on insulator). The former has trouble in electrode arranging, and the latter is suffer from higher cost than standard semiconductor process. In thesis, we announced a new way to solve the problems. We fabricate polysilicon nanowire field effect transistor to sense pH value. In the first part of thesis, we made FET with bottom gate. And When measuring pH value, device layer is cover by photoresist. Channel is open by aligner. The structure not only doesn''t have problem in arranging electrode but also could be made by standard semiconductor process. In the future, it will be used to detect biomolecules