A Novel Electromagnetic Actuated and Damped 3-DOF Precision Positioning Stage with Flexure Suspension
碩士 === 國立臺灣大學 === 電機工程學研究所 === 96 === This thesis proposes a novel planar electromagnetic actuated and damped positioning stage for precision positioning applications. The moving stage is suspended by the monolithic parallel flexure mechanism, whose motion comes from the elastic deformation of the f...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/54038890231774114820 |