A Novel Electromagnetic Actuated and Damped 3-DOF Precision Positioning Stage with Flexure Suspension
碩士 === 國立臺灣大學 === 電機工程學研究所 === 96 === This thesis proposes a novel planar electromagnetic actuated and damped positioning stage for precision positioning applications. The moving stage is suspended by the monolithic parallel flexure mechanism, whose motion comes from the elastic deformation of the f...
Main Authors: | Chih-Hsien Lin, 林志憲 |
---|---|
Other Authors: | 傅立成 |
Format: | Others |
Language: | en_US |
Published: |
2008
|
Online Access: | http://ndltd.ncl.edu.tw/handle/54038890231774114820 |
Similar Items
-
Design and Implementation of a New Three-DOF Electromagnetically Actuated Precision Positioning Stage with Flexure Mechanism
by: Kuan-Lin Huang, et al.
Published: (2010) -
A Novel 6-DOF Electromagnetic Precision Positioner Utilizing Flexure Mechanism
by: Zhao-Kai Wu, et al.
Published: (2006) -
A 2-DOF Piezoelectric Inchworm Actuator for Precise Positioning
by: Shunming Hua, et al.
Published: (2014-01-01) -
The Precise Positioning of 2-D and 3-DOF by Piezoelectric actuator
by: 許洋豪
Published: (2008) -
The Application of Computer Aided Engineering on the Design of Piezoelectric Actuated Flexure Hinge Stage for Precision Positioning
by: Pao-Kuo Liu, et al.
Published: (2001)