| Summary: | 碩士 === 國立臺灣大學 === 機械工程學研究所 === 96 === This research studies the design and analysis of a vacuum pump with new claw rotors. The purpose of this research is to develop a low cost and high performance dry vacuum pump by using new claw rotors. First, new claw rotor profiles are proposed based on rotor parameters such as pitch radius, rotor radius, claw depth, and the angle of a small arc. A parametric program is also developed to generate various claw rotor profiles with given input parameters. Then, a dry vacuum pump using the new claw rotors is designed. The design focuses on the gaps between the two matching rotors and between the rotor and the stator. Special rotor orientation design is also considered such that the gaps between all running components are limited to the required accuracy. Angle shifts between two matching rotors and between two timing gears are analyzed according to manufacturing tolerances of pump components. Performances of the vacuum pump, such as area efficiency, leakage flow effects, required torque and power consumption, are predicted based on input drawing parameters. Through the calculation of these pump performances, influences of each input parameters can be predicted. Finally, a prototype of the new claw vacuum pump is manufactured, and performances of the prototype are measured. From the measured results, it shows that this new claw vacuum pump has better performance than conventional Roots pumps and other claw vacuum pumps in the market.
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