Application of Phase-Shift Interference for Measuring Line-Width in Mirco-Nanometer Scale
碩士 === 國立臺灣科技大學 === 機械工程系 === 96 === An optical interference system incorporating a microscope and a piezoelectric actuator was developed to measure line-width of the step in micro-nanometer scale. Application of phase-shift techniques for measurement in flatness is common. However, it is not easy t...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/23948050097481063993 |