Application of Phase-Shift Interference for Measuring Line-Width in Mirco-Nanometer Scale
碩士 === 國立臺灣科技大學 === 機械工程系 === 96 === An optical interference system incorporating a microscope and a piezoelectric actuator was developed to measure line-width of the step in micro-nanometer scale. Application of phase-shift techniques for measurement in flatness is common. However, it is not easy t...
Main Authors: | Jyun-Yu Liou, 劉俊余 |
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Other Authors: | none |
Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/23948050097481063993 |
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