A Novel Three-Degree-of-Freedom Diffraction Type Laser Linear Encoder
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 96 === In this study, a three-degrees-of-freedom laser encoder was developed. The measuring principles of linear displacement measurement was based on the diffractive method and polarization interference method. The angle measuring method was the autocollimation me...
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2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32x7w3 |
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ndltd-TW-096NYPI51240352019-09-22T03:40:55Z http://ndltd.ncl.edu.tw/handle/32x7w3 A Novel Three-Degree-of-Freedom Diffraction Type Laser Linear Encoder 新型三自由度繞射雷射光學尺系統 Hsin-Hao Teng 鄧信豪 碩士 國立虎尾科技大學 光電與材料科技研究所 96 In this study, a three-degrees-of-freedom laser encoder was developed. The measuring principles of linear displacement measurement was based on the diffractive method and polarization interference method. The angle measuring method was the autocollimation method. These optical paths of these two methods are designed in a single optical system. The resolution of linear displacement is 13.1 nm and the angular resolution is 0.11 arcsec.The HP laser interferometer and an autocollimator were used to verify our proposed system. The accuracy of linear displacements is 160 nm and the accuracy of angular measurement is 0.41 arcsec. Wen-Yuh Jywe 覺文郁 2008 學位論文 ; thesis 69 zh-TW |
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碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 96 === In this study, a three-degrees-of-freedom laser encoder was developed. The measuring principles of linear displacement measurement was based on the diffractive method and polarization interference method. The angle measuring method was the autocollimation method. These optical paths of these two methods are designed in a single optical system. The resolution of linear displacement is 13.1 nm and the angular resolution is 0.11 arcsec.The HP laser interferometer and an autocollimator were used to verify our proposed system. The accuracy of linear displacements is 160 nm and the accuracy of angular measurement is 0.41 arcsec.
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| author2 |
Wen-Yuh Jywe |
| author_facet |
Wen-Yuh Jywe Hsin-Hao Teng 鄧信豪 |
| author |
Hsin-Hao Teng 鄧信豪 |
| spellingShingle |
Hsin-Hao Teng 鄧信豪 A Novel Three-Degree-of-Freedom Diffraction Type Laser Linear Encoder |
| author_sort |
Hsin-Hao Teng |
| title |
A Novel Three-Degree-of-Freedom Diffraction Type Laser Linear Encoder |
| title_short |
A Novel Three-Degree-of-Freedom Diffraction Type Laser Linear Encoder |
| title_full |
A Novel Three-Degree-of-Freedom Diffraction Type Laser Linear Encoder |
| title_fullStr |
A Novel Three-Degree-of-Freedom Diffraction Type Laser Linear Encoder |
| title_full_unstemmed |
A Novel Three-Degree-of-Freedom Diffraction Type Laser Linear Encoder |
| title_sort |
novel three-degree-of-freedom diffraction type laser linear encoder |
| publishDate |
2008 |
| url |
http://ndltd.ncl.edu.tw/handle/32x7w3 |
| work_keys_str_mv |
AT hsinhaoteng anovelthreedegreeoffreedomdiffractiontypelaserlinearencoder AT dèngxìnháo anovelthreedegreeoffreedomdiffractiontypelaserlinearencoder AT hsinhaoteng xīnxíngsānzìyóudùràoshèléishèguāngxuéchǐxìtǒng AT dèngxìnháo xīnxíngsānzìyóudùràoshèléishèguāngxuéchǐxìtǒng AT hsinhaoteng novelthreedegreeoffreedomdiffractiontypelaserlinearencoder AT dèngxìnháo novelthreedegreeoffreedomdiffractiontypelaserlinearencoder |
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