Development of a novel measuring system for measurement of the three-dimensional tip position and outer diameter of a micro-drill

• Main Authors: Chun-Ming Li, 李俊明
• Other Authors: Chien-Hung Liu
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/745c2h

碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 96 === In the study, a non-contact three-dimensional micro-drill tip position and outer diameter optical measuring system has been developed. The measurement system is only composed of a laser diode and a quadrant detector. The focused laser beam is projected on the quadrant detector. The measuring principle uses knife-edge scanning method and diffraction method to measure the energy distribution between the micro-drill position and the quadrant detector. Using the diffraction method, the resolutions of spatial coordinates of X- and Y-axial measurement are both estimated to be 0.2μm. Using the knife-edge scanning method, the resolution of Z-axial measurement is estimated to 0.75μm. Comparisons with the image measurement system and the proposed knife-edge scanning method, the measuring accuracy of the micro-drill outer diameter with 100μm and 200μm of are both 99%, and with 1.5mm is 98%.