Development of a novel measuring system for measurement of the three-dimensional tip position and outer diameter of a micro-drill
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 96 === In the study, a non-contact three-dimensional micro-drill tip position and outer diameter optical measuring system has been developed. The measurement system is only composed of a laser diode and a quadrant detector. The focused laser beam is projected on th...
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ndltd-TW-096NYPI51240362019-09-22T03:40:55Z http://ndltd.ncl.edu.tw/handle/745c2h Development of a novel measuring system for measurement of the three-dimensional tip position and outer diameter of a micro-drill 微型刀具刀尖三維空間位置與刀徑光學量測系統開發 Chun-Ming Li 李俊明 碩士 國立虎尾科技大學 光電與材料科技研究所 96 In the study, a non-contact three-dimensional micro-drill tip position and outer diameter optical measuring system has been developed. The measurement system is only composed of a laser diode and a quadrant detector. The focused laser beam is projected on the quadrant detector. The measuring principle uses knife-edge scanning method and diffraction method to measure the energy distribution between the micro-drill position and the quadrant detector. Using the diffraction method, the resolutions of spatial coordinates of X- and Y-axial measurement are both estimated to be 0.2μm. Using the knife-edge scanning method, the resolution of Z-axial measurement is estimated to 0.75μm. Comparisons with the image measurement system and the proposed knife-edge scanning method, the measuring accuracy of the micro-drill outer diameter with 100μm and 200μm of are both 99%, and with 1.5mm is 98%. Chien-Hung Liu 劉建宏 2008 學位論文 ; thesis 82 zh-TW |
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碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 96 === In the study, a non-contact three-dimensional micro-drill tip position and outer diameter optical measuring system has been developed. The measurement system is only composed of a laser diode and a quadrant detector. The focused laser beam is projected on the quadrant detector. The measuring principle uses knife-edge scanning method and diffraction method to measure the energy distribution between the micro-drill position and the quadrant detector. Using the diffraction method, the resolutions of spatial coordinates of X- and Y-axial measurement are both estimated to be 0.2μm. Using the knife-edge scanning method, the resolution of Z-axial measurement is estimated to 0.75μm. Comparisons with the image measurement system and the proposed knife-edge scanning method, the measuring accuracy of the micro-drill outer diameter with 100μm and 200μm of are both 99%, and with 1.5mm is 98%.
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Chien-Hung Liu |
author_facet |
Chien-Hung Liu Chun-Ming Li 李俊明 |
author |
Chun-Ming Li 李俊明 |
spellingShingle |
Chun-Ming Li 李俊明 Development of a novel measuring system for measurement of the three-dimensional tip position and outer diameter of a micro-drill |
author_sort |
Chun-Ming Li |
title |
Development of a novel measuring system for measurement of the three-dimensional tip position and outer diameter of a micro-drill |
title_short |
Development of a novel measuring system for measurement of the three-dimensional tip position and outer diameter of a micro-drill |
title_full |
Development of a novel measuring system for measurement of the three-dimensional tip position and outer diameter of a micro-drill |
title_fullStr |
Development of a novel measuring system for measurement of the three-dimensional tip position and outer diameter of a micro-drill |
title_full_unstemmed |
Development of a novel measuring system for measurement of the three-dimensional tip position and outer diameter of a micro-drill |
title_sort |
development of a novel measuring system for measurement of the three-dimensional tip position and outer diameter of a micro-drill |
publishDate |
2008 |
url |
http://ndltd.ncl.edu.tw/handle/745c2h |
work_keys_str_mv |
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