Synthesis and and Properties of Chromium Oxide and Chromium Silicide Nanostructures

• Main Authors: yen hsun chu, 朱彥勳
• Other Authors: Han C. Shih
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/89748969845926996811

碩士 === 中國文化大學 === 材料科學與奈米科技研究所 === 96 === This research mainly utilized the thermal evaporation method to synthesize the chromium oxide and chromium silicide nanostructures and their structures and properties were subsequently characterized. The entire experiments can be divided into two parts: first, the utilization of pure chromium power as the chromium vapor source to produce the chromium oxide nanostructures ; second, to make use of the CrCl3．6H2O to produce chromium silicide. Both the nanostructures were formed on the silicon (110) substrate. The effect of temperature on the growth of chromium nanostructures was compared and discussed in this work. Of particular interest is our success in selecting chromium chloride as the chromium source for the chromium silicide nanostructures. Various analytic tools were applied to characterize the fabricated chromium oxide and chromium silicide nanostructures. For surface morphology FESEM was used to observe the nanostructures of the thermally evaporated chromium oxide and chromium silicide. The chemical composition of the chromium oxide and chromium silicide was analyzed by EDS. The outcome of chromium silicide was also confirmed as the result of chromium chloride being used as the source for chromium. XRD characterized the nanostructures of chromium oxide belonging to rhombohedral system, while chromium silicide belonging to the hexagonal system. HRTEM also assisted in the structure analysis showing that the growth direction in along [110]. Finally, through the measurements of cathodoluminescence spectrum equipped in SEM, it indicated an optic peak in a range of the blue which may have the opportunity in the application of LED, electronic materials