Micro- and nano- structures formation on cycloolefin copolymer through hot embossing imprint

• Main Authors: Mei-Chun Lai, 賴美君
• Other Authors: 芮祥鵬
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/hbvsm8

碩士 === 國立臺北科技大學 === 有機高分子研究所 === 96 === The research investigates the flow properties of cycloolefins copolymer(COC) substrate in the cavity with nano-and micro- structure by hot embossing imprint. There are two COC materials with similar glass transition temperatures (Tgs) and different melting mobility used in the research . The nano-cavity of a template with pillar pattern is 200nm diameter and the micro-cavity with prism pattern has a width of 50nm and a height of 25um .The filling heights and shapes are studied by different imprint conditions such as imprint temperature ,imprint force and imprint time. The theories of viscoelastic fluid are applied to study the filling height of polymer substrate in nano-and micro-cavity. The result of nano-cavity show that when the imprint temperature is 30℃ hiegher than Tg , the mobility of two mCOC resins increase substantially. The filling heights of mCOC-1 are different with different imprint temperatures and imprint forces. However, the filling heights of mCOC-2 are little influenced by the imprinting forces when the imprint temperatures are heigh. The capillary theory are derived for the filling heights of mCOC-1 and mCOC-2 at the imprinting time 1 minutes in nano cavity. The results of micro-structure indicate that when the imprint temperature are 15℃~20℃ higher than Tgs of mCOC resins , imprinting temperature is the key factor to determine the imprinting force and imprinting time.