| Summary: | 碩士 === 吳鳳技術學院 === 光機電暨材料研究所 === 97 === Recently, one of the most interesting semiconducting materials for nanowire fabrication and exploitation is ZnO. Zinc oxide nanowire could be integrated on device platforms for numerous applications, including chemical sensors and nanoelectronics. Zinc oxide is a very good light emitter. Electrically driven zinc oxide single nanowire lasers could serve as high efficiency nanoscale light sources for optical data storage, imaging, and biological and chemical sensing.
In this thesis, Anodic aluminum oxide (AAO) was used as a template to prepare highly ordered ZnO nanowire arrays. First, the use of oxalic acid solution prepare anodic aluminum oxide template was discussed. This AAO template was fabricated with the one-step anodizing method. The AAO template processes show that electro polishing, anodizing voltage, and electrolyte temperature can affect the uniformity of nano-holes. Secondly, electrodeposition ZnO nanowire arrays using AAO template was further discussed. In this study, deposition temperature, pH value, current density and deposition time will strongly affect the growth characters of zinc oxide nanowire arrays. The nanowires have an aspect ratio ranging from 10 to 300 dependent on the transient variation of cathodic current and deposition time. X-ray diffraction (XRD) shows that the increase of preferred orientation (002) is strongly dependent on deposition time and pH value. Additionally, the results of Scanning Electron Microscope (SEM) indicate that the pores of AAO template are highly uniformed and almost all the pores are filled with ZnO nanowire . Concluding the experiment results, the optimum parameters for zinc oxide nanowire arrays electrodeposition are: deposition voltage (-1V), deposition temperature (75℃), and pH value (6).
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