Fabrication of Mn oxide electrodes by DC and RF sputtering for electrochemical capacitors

• Main Authors: Peng-Yu Lin, 林朋羭
• Other Authors: Chuen-Chang Lin
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/vqw548

碩士 === 國立雲林科技大學 === 化學工程與材料工程研究所 === 96 === A procedure is Characteristics of electrochemical capacitors include higher energy density, higher power density, and longer life cycle. They can be applied in 3C (Computer, Communication, Consumptive electronic product) and the quality, reliability and cost competition advantage of 3C products can be improved. Thus their graphite foil electrodes will be sputtered by direct current (DC) and radio frequency (RF) , in this study. First, manganese oxide will be sputtered in graphite foil electrodes with different volume flow rates of oxygen, sputtering pressure, power, and time. Then, sputtered graphite foil electrodes will be annealed. Finally, graphite foil electrodes will be tested by XRD, FE-SEM, AFM, and XPS, etc.. Additionally, in order to find better sputtering conditions and annealing temperature of graphite foil electrodes, graphite foil electrodes will be proceeded electrochemical tests.