Producing Multi-Layer Block Copolymer Nano-Template with Different Phase Separation Orientation between Layers by Stacking Method
碩士 === 國立中正大學 === 機械工程所 === 97 === Recently, the industries use the top-down lithography technique to produce nano-template, but which has many limitations like the light wavelength and etching difficulty. The bottom-up method becomes the stream for producing nano-template. Because the block copolym...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38870541806865183541 |
| Summary: | 碩士 === 國立中正大學 === 機械工程所 === 97 === Recently, the industries use the top-down lithography technique to produce nano-template, but which has many limitations like the light wavelength and etching difficulty. The bottom-up method becomes the stream for producing nano-template. Because the block copolymer has self-assembly microphase separation property and the phase separation with nano-scale, it is good for producing the nano-template by bottom-up method. The thesis is probed into the possible about using BCP to make multi-layer nano-template.
The thesis continues studying “Patterned BCP Film with Long-Range Order of Micro-Phase Separation Using Combination of Contact-Printing and Shear-Force Control”, then to produce multi-layer BCP nano-template by stacking method. The thesis using UV light irradiated method to overcome the affects to the first layer when we do the shear force control to the second layer, so we can produce the multi-layer BCP nano-template with different phase separation orientation between layers.
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