Producing Multi-Layer Block Copolymer Nano-Template with Different Phase Separation Orientation between Layers by Stacking Method
碩士 === 國立中正大學 === 機械工程所 === 97 === Recently, the industries use the top-down lithography technique to produce nano-template, but which has many limitations like the light wavelength and etching difficulty. The bottom-up method becomes the stream for producing nano-template. Because the block copolym...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38870541806865183541 |