| Summary: | 碩士 === 國立中正大學 === 光機電整合工程所 === 97 === In this thesis, ZnO nanorods were fabricated by two-step process. In the first instance, the substrate was pre-coated seed layer by sol-gel spin-coating method before growing nanorods . Secondly, ZnO nanorods were synthesized by Chemical bath deposition (CBD). The grain sizes of seed layer were depended on annealing temperatures, which affects the radius of the nanorods. In order to keep the concentrations, we improved the method by replacing the solution several times in relays, which make the nanorods longer and more stable.
Because the environment temperatures, concentrations and reaction time affect the appearance of the nanorods, we experiment above parameters to obtain uniform nanorods, and we observed all these changes by SEM, XRD and transmittance spectra ….,etc.
The structures of photonic crystal with air holes were prepared by E-beam lithography on electro-resist layer. Then ZnO nanorods filled in air holes by Chemical bath deposition. The photonic crystal structure will be added on lighting device to enhance the luminescence efficiency.
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