Study of using femtosecond laser and chemical etching to fabricate a microfluidic inside photosensitive glass and discussion of manufacture parameters
碩士 === 國立中正大學 === 光機電整合工程所 === 97 === This study focuses on fabrication of microstructure inside the photosensitive glass using a femtosecond laser directing writing method. The photosensitive glass is first processing by the laser to selectively modify its material property under the laser path....
Main Authors: | Ping-Shung Lee, 李評翔 |
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Other Authors: | Jeng-Shyong Chen |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/11575650668342913048 |
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