On The Fabrication of Field Emission Device And It’s ESD Application

• Main Authors: Zhong Wei Liao, 廖仲偉
• Other Authors: L. B. Chang
• Format: Others
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/48010799465435065443

碩士 === 長庚大學 === 電子工程學研究所 === 97 === This research work fabricates and develops the field emission device and it’s surge pulse suppressing applications. We adopt of this device in the Electrostatic ESD or EMP Discharge electric circuit for the first time and can become one kind of new surge suppressing units. The conventional ESD protection device such as Metal Oxide Varistors (MOV), Gas Discharge Tube, Transient Voltage Suppressor (TVS) etc are used for the suppressor element but these devices have slower response time, in a fast surge introducing situation, or lower surge endurance and thus reduces its practical usability. This work describes the fabrication method of different kind of FED structure and meets the condition which ESD/EMP needs. The electron beam evaporation system is used to deposit the blocking layer, isolation layer and the electrode. The wet etching of the surface is performed with KOH (Potassium Hydroxide) solution. Fabrication of tips which FED need, and the packaging FED are also performed. This FED is then applied to an ESD/EMP protection circuit. Finally ESD/EMP protection capability is tested by using the ESD simulator. Depending on the FED/EMP’s emission characteristic, during normal operation, the ESD’s circuit allows to pass signal easily. However, when intense overvoltage surge occurs, it’s promptly ground the overvoltage surge. Therefore it is able to protect the subsequent electronic circuit from ESD or EMP.