On The Fabrication of Field Emission Device And It’s ESD Application
碩士 === 長庚大學 === 電子工程學研究所 === 97 === This research work fabricates and develops the field emission device and it’s surge pulse suppressing applications. We adopt of this device in the Electrostatic ESD or EMP Discharge electric circuit for the first time and can become one kind of new surge suppressi...
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ndltd-TW-097CGU054280452015-10-13T12:04:56Z http://ndltd.ncl.edu.tw/handle/48010799465435065443 On The Fabrication of Field Emission Device And It’s ESD Application 場發射元件研製及其ESD應用研究 Zhong Wei Liao 廖仲偉 碩士 長庚大學 電子工程學研究所 97 This research work fabricates and develops the field emission device and it’s surge pulse suppressing applications. We adopt of this device in the Electrostatic ESD or EMP Discharge electric circuit for the first time and can become one kind of new surge suppressing units. The conventional ESD protection device such as Metal Oxide Varistors (MOV), Gas Discharge Tube, Transient Voltage Suppressor (TVS) etc are used for the suppressor element but these devices have slower response time, in a fast surge introducing situation, or lower surge endurance and thus reduces its practical usability. This work describes the fabrication method of different kind of FED structure and meets the condition which ESD/EMP needs. The electron beam evaporation system is used to deposit the blocking layer, isolation layer and the electrode. The wet etching of the surface is performed with KOH (Potassium Hydroxide) solution. Fabrication of tips which FED need, and the packaging FED are also performed. This FED is then applied to an ESD/EMP protection circuit. Finally ESD/EMP protection capability is tested by using the ESD simulator. Depending on the FED/EMP’s emission characteristic, during normal operation, the ESD’s circuit allows to pass signal easily. However, when intense overvoltage surge occurs, it’s promptly ground the overvoltage surge. Therefore it is able to protect the subsequent electronic circuit from ESD or EMP. L. B. Chang 張連璧 2009 學位論文 ; thesis 78 |
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碩士 === 長庚大學 === 電子工程學研究所 === 97 === This research work fabricates and develops the field emission device and it’s surge pulse suppressing applications. We adopt of this device in the Electrostatic ESD or EMP Discharge electric circuit for the first time and can become one kind of new surge suppressing units. The conventional ESD protection device such as Metal Oxide Varistors (MOV), Gas Discharge Tube, Transient Voltage Suppressor (TVS) etc are used for the suppressor element but these devices have slower response time, in a fast surge introducing situation, or lower surge endurance and thus reduces its practical usability.
This work describes the fabrication method of different kind of FED structure and meets the condition which ESD/EMP needs. The electron beam evaporation system is used to deposit the blocking layer, isolation layer and the electrode. The wet etching of the surface is performed with KOH (Potassium Hydroxide) solution. Fabrication of tips which FED need, and the packaging FED are also performed. This FED is then applied to an ESD/EMP protection circuit. Finally ESD/EMP protection capability is tested by using the ESD simulator.
Depending on the FED/EMP’s emission characteristic, during normal operation, the ESD’s circuit allows to pass signal easily. However, when intense overvoltage surge occurs, it’s promptly ground the overvoltage surge. Therefore it is able to protect the subsequent electronic circuit from ESD or EMP.
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author2 |
L. B. Chang |
author_facet |
L. B. Chang Zhong Wei Liao 廖仲偉 |
author |
Zhong Wei Liao 廖仲偉 |
spellingShingle |
Zhong Wei Liao 廖仲偉 On The Fabrication of Field Emission Device And It’s ESD Application |
author_sort |
Zhong Wei Liao |
title |
On The Fabrication of Field Emission Device And It’s ESD Application |
title_short |
On The Fabrication of Field Emission Device And It’s ESD Application |
title_full |
On The Fabrication of Field Emission Device And It’s ESD Application |
title_fullStr |
On The Fabrication of Field Emission Device And It’s ESD Application |
title_full_unstemmed |
On The Fabrication of Field Emission Device And It’s ESD Application |
title_sort |
on the fabrication of field emission device and it’s esd application |
publishDate |
2009 |
url |
http://ndltd.ncl.edu.tw/handle/48010799465435065443 |
work_keys_str_mv |
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