Design and Fabrication of Micro Electromagnetic Actuator Array
碩士 === 大葉大學 === 機械與自動化工程學系 === 97 === This paper presents a novel technique for the fabrication of electromagnetic micro actuator. Make use of micro-coils of way manufacturing actuator. This technology combining Optical Lithography、Electron Beam Evaporator、Electroplating produce micro actuator. The...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65437201491046636871 |