Carbon nanowalls grown by DC-PECVD and its field emission measurement

碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 97 === Carbon nanowalls were grown on silicon substrates by direct-current plasma enhanced chemical vapor deposition and measured the electron field emission of these coatings. It was found that the turn-on field could be as low as 1-2 V/um. After having successful...

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Bibliographic Details
Main Authors: Chia-Lung Chen, 陳家隆
Other Authors: Yonhua Tzeng
Format: Others
Published: 2009
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