Carbon nanowalls grown by DC-PECVD and its field emission measurement
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 97 === Carbon nanowalls were grown on silicon substrates by direct-current plasma enhanced chemical vapor deposition and measured the electron field emission of these coatings. It was found that the turn-on field could be as low as 1-2 V/um. After having successful...
Main Authors: | Chia-Lung Chen, 陳家隆 |
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Other Authors: | Yonhua Tzeng |
Format: | Others |
Language: | zh-TW |
Published: |
2009
|
Online Access: | http://ndltd.ncl.edu.tw/handle/91404662168487103434 |
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