Influence of Fe-doping on the Properties of High-dielectric Ba0.5Sr0.5TiO3 Thin Film
碩士 === 國立成功大學 === 電機工程學系碩博士班 === 97 === In this study, the Fe-doped Ba0.5Sr0.5TiO3 high dielectric thin films with Fe content of 0wt%, 0.25wt%, 0.5wt%, 1wt%, 2wt%, 3wt%, and 5wt% were deposited by rf magnetron sputter on Pt/SiO2/Si substrates, and MIM structures are fabricated. Discussion and analys...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35051562901191435965 |