Scheduling Semiconductor In-line Steppers in New Product/Process Introduction Scenarios
博士 === 國立交通大學 === 工業工程與管理系所 === 97 === Abstract This dissertation examines job scheduling problems for in-line steppers operating in a new process/production introduction (NPI) scenario. An in-line stepper is a bottleneck machine in a semiconductor fab. Its interior is comprised of a series of chamb...
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| Format: | Others |
| Language: | zh-TW |
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2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52331998935028036601 |