Investigation on the Structure-Property Relationship of Nano-Clustering Silica (NCS) Porous Low-k Thin Films
碩士 === 國立交通大學 === 材料科學與工程系所 === 97 === The structure-property relationship of nano-clustering silica (NCS) porous low-k films (k ~2.8 to 2.0) was investigated by controlling silica matrix TEOS/MTMS ratio and structure directing agent or also acted as pore generator TPAOH concentration. Emphasize had...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/33139452092938359735 |