Risk Management for Semiconductor Factory Annual Maintenance Period -A Case Study of E Corporation

• Main Authors: Chen,Wei-Min, 陳偉民
• Other Authors: Chen,Chun-Sung
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/06415322470389261323

碩士 === 國立交通大學 === 工學院碩士在職專班產業安全與防災組 === 97 === Abstract Semiconductor manufacturing fab is classified as the industry that can not only yield higher output value but also has higher risk. Therefore, it has to adopt the process of 24-hour operation and production to upgrade its economic efficiency; however, except for regular and routine maintenance, the machinery equipment, after long-term use, has frequently been cooperated with Taipower Company’s schedule of annual maintenance to conduct and implement the annual reaping and maintenance construction for related fab facilities in order to preserve the efficiency for the machinery equipment. Even for those engineering projects that were expected to be improved or additional equipment and machine, they will also cooperate with such period to implement related operations. Thus, we knew that many engineering projects need to be completed in a short period of time; however, there is only emergency power remained in fab area that supplied by generator in general, and the majority of such electric power will be used to keep the operation of air-conditioning system in order to ensure of normal cleanness, temperature and humidity for the clean room; therefore, the emergency power can only be supplied partial lighting. As a result, it may cause fab area to become more dim than usual; meanwhile, many constructions with specifically hazardous operations may carry out in fab area, such as: high-elevation operation, hanging operation, dismantling operation of gaseous chemical piping, hazardous machinery equipment operation, fire operation, and confined space operation, etc.; therefore, it can be seen that high risk has existed in the period of annual maintenance, and it is an important issue that worthy to conduct in-depth research on how smoothly complete all constructions one by one under safe working condition. This study is mainly focused on how to implement effective risk management during the annual maintenance period for semiconductor fabs; in addition, through the mechanism of risk management to effectively reduce the occurrence of accident and avoid personnel injury and property loss as well. This study has also adopted a case study of E Company to sort out those parts that can be further improved, and has proposed some improving strategies of feasibility in order to provide as a reference to implement the annual maintenance for semiconductor fabs in the future.