The morphology and component analysis of ZnO nanostructures fabricated by Ar+ ion beam bombardment and thermal oxidation

• Main Authors: Chia-Hao Tu, 塗家豪
• Other Authors: 李敬萱
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/xf57kd

碩士 === 國立中央大學 === 材料科學與工程研究所 === 97 === Since carbon nanotube has been found, the one dimension of nanostructures has attracted great attention gradually, Among them that zinc oxide is one of the hot applications recently. Zinc oxide has broad range of applications and potentiality because of its variety of nanostructures、chemical and thermal stability and light emission. In this thesis, we use Ar+ ion beam bombard zinc foil. Make zinc surface rough, and cooperate with thermal oxidation in the air. Produce zinc oxide nanostructures. We use 5、7、10keV ion beam energy and bombard 1、4、8、16 hours. After fabrication, the morphology of the sample is examined by scanning electron microscopy(SEM), and the component analysis is by X-ray photoelectron spectroscopy(XPS) About the experiment results, the raised positions of rough surface after ion beam sputter will grown zinc oxide nanostructures, and different bombard hours induce different morphology types. When bombardment ions reduces, the bombardment energy will become more important of grown Zinc oxide nanostructures. In XPS, rise bombardment ions and energy also enhance the yield and the quality of Zinc oxide. Final, after N2+ions bombard, Zinc oxide nanostructures will grown more thin, but the yield will reduce.