| Summary: | 碩士 === 國立中央大學 === 光電科學研究所 === 97 === The present papers proposed that three kinds of improvement optical pick-up head design, to substitution pick-up head with inclined of 45 degree plate beamsplitter, and apply to measure the tilt angles and the longitudinal displacements in the gauging testing surface, with the signal simulation and analysis. The linear gauging range can increase to about 8μm, and reduce the angle tilt effectively to the displacement signal, promotes the interpretability for different azimuth.
The new design form can obtain in the application scans the side the surface profile, and be possible to unifies optical pick-up head gauging system into the atomic force microscope used in surveying the displacement and the tilt angle of the cantilever, besides has the fine resolution, the structure is also very exquisite, and the low in price, may promote the entire gauging system''s accuracy in the future along with the performance evolution of the optical pick-up head.
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