Applying multimode interference couplers in ring resonators

• Main Authors: Yi-Lin Tsai, 蔡宜霖
• Other Authors: Tsong-Sheng Lay
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/c7td6e

碩士 === 國立中山大學 === 光電工程學系研究所 === 97 === This study uses vertical mirror optical waveguide reflector and bending waveguide to fabricate semiconductor ring resonators. By using multimode interference couplers with specific width and length that generate distinctive energy distribution to achieve the power splitting of 85:15. We integrate vertically deep etching turning mirror to reflect optical mode, and reduce the component size to 37.6%. In fabrication process, this study applies multiple wet etching technique to form the waveguide structure. First, we use wet etching technique to etch ridge waveguide and turning mirror, and then perform deep etching in the periphery of bending and turning region to reduce the bending loss. Finally, the etching mask is lifted off, and the wafer is polished and sliced for measurement. After measuring the signal, we can compute waveguide loss by Fabry-perot resonant situation. The waveguide loss is 59.6dB/cm. Power splitting of 90:10 is achieved. The free spectral range (FSR) is 72GHz for the ring resonators.