Investigation of transparent conductive ZnO:Al thinfilms deposited by RF sputtering
碩士 === 國立中山大學 === 光電工程學系研究所 === 97 === In this thesis, we focus on the properties of Al-doped ZnO (AZO) thin films for opto-electronic applications. AZO films were prepared by radio-frequency sputtering on silicon and optical glass substrates with 98wt% ZnO and 2wt% Al2O3 alloy target. AZO films wer...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/382w29 |