Characteristics Analysis of Electrodeposition of Diamond-like Carbon thin films

• Main Authors: Deng-Yu Huang, 黃登煜
• Other Authors: Heng-Yi Ueng
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/pxa775

碩士 === 國立中山大學 === 電機工程學系研究所 === 97 === Diamond-Like Carbon (DLC) films have been deposited on ITO glass substrate. DLC thin film was electrodeposited at low DC potential using a mixture of acetic acid and DI water. The DLC film deposition parameters include DC potential, deposited temperature, the concentration of electrolyte were used to study the characteristics of DLC film measured by the Ellipsometer, XPS, SEM and Raman spectroscopy in detail. The Raman spectra shows two peaks located near 1358cm-1 and 1580cm-1 assigned as the characteristics peaks of DLC films. That is an evidence for DLC film deposited successfully on ITO glass. Scanning electron microscopy (SEM) can make insight into accurately the surface morphology and uniformity of DLC films so as used to grow the best quality of DLC films. From the variations of the I-t curve and the surface morphology observed by SEM, the properties of DLC film depend on a verity of growth parameters such as applied voltage, the concentration of electrolyte and deposition temperature. The shift of G-peak increase with the applied voltage, and the sp2/sp3 ratio of the content C1s decreases with the applied voltage. Finally, based on the I-t curve and results of SEM, XPS, Raman, and Ellipsometer for n, k coefficients measured, we obtain a deeply understanding for the growth conditions of DLC films and their surface morphology. We achieve the consistent results between various measurements. Finally, the optimizing growth of DLC film is to be studied and discussed in future