A study on thinning silicon wafer with Ultimate Diamond Disk
碩士 === 國立清華大學 === 動力機械工程學系 === 97 ===
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Online Access: | http://ndltd.ncl.edu.tw/handle/99825357804062132700 |
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ndltd-TW-097NTHU53110902015-11-13T04:08:48Z http://ndltd.ncl.edu.tw/handle/99825357804062132700 A study on thinning silicon wafer with Ultimate Diamond Disk 終極鑽石碟薄化矽晶圓之加工特性研究 Chang, Hung-Chieh 張弘杰 碩士 國立清華大學 動力機械工程學系 97 Tso, Pei-Lum 左培倫 2009 學位論文 ; thesis 98 zh-TW |
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zh-TW |
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Others
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碩士 === 國立清華大學 === 動力機械工程學系 === 97 ===
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author2 |
Tso, Pei-Lum |
author_facet |
Tso, Pei-Lum Chang, Hung-Chieh 張弘杰 |
author |
Chang, Hung-Chieh 張弘杰 |
spellingShingle |
Chang, Hung-Chieh 張弘杰 A study on thinning silicon wafer with Ultimate Diamond Disk |
author_sort |
Chang, Hung-Chieh |
title |
A study on thinning silicon wafer with Ultimate Diamond Disk |
title_short |
A study on thinning silicon wafer with Ultimate Diamond Disk |
title_full |
A study on thinning silicon wafer with Ultimate Diamond Disk |
title_fullStr |
A study on thinning silicon wafer with Ultimate Diamond Disk |
title_full_unstemmed |
A study on thinning silicon wafer with Ultimate Diamond Disk |
title_sort |
study on thinning silicon wafer with ultimate diamond disk |
publishDate |
2009 |
url |
http://ndltd.ncl.edu.tw/handle/99825357804062132700 |
work_keys_str_mv |
AT changhungchieh astudyonthinningsiliconwaferwithultimatediamonddisk AT zhānghóngjié astudyonthinningsiliconwaferwithultimatediamonddisk AT changhungchieh zhōngjízuānshídiébáohuàxìjīngyuánzhījiāgōngtèxìngyánjiū AT zhānghóngjié zhōngjízuānshídiébáohuàxìjīngyuánzhījiāgōngtèxìngyánjiū AT changhungchieh studyonthinningsiliconwaferwithultimatediamonddisk AT zhānghóngjié studyonthinningsiliconwaferwithultimatediamonddisk |
_version_ |
1718128277127692288 |