A study on thinning silicon wafer with Ultimate Diamond Disk

碩士 === 國立清華大學 === 動力機械工程學系 === 97 ===

Bibliographic Details
Main Authors:	Chang, Hung-Chieh, 張弘杰
Other Authors:	Tso, Pei-Lum
Format:	Others
Language:	zh-TW
Published:	2009
Online Access:	http://ndltd.ncl.edu.tw/handle/99825357804062132700

id	ndltd-TW-097NTHU5311090
record_format	oai_dc
spelling	ndltd-TW-097NTHU53110902015-11-13T04:08:48Z http://ndltd.ncl.edu.tw/handle/99825357804062132700 A study on thinning silicon wafer with Ultimate Diamond Disk 終極鑽石碟薄化矽晶圓之加工特性研究 Chang, Hung-Chieh 張弘杰碩士國立清華大學動力機械工程學系 97 Tso, Pei-Lum 左培倫 2009 學位論文 ; thesis 98 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 動力機械工程學系 === 97 ===
author2	Tso, Pei-Lum
author_facet	Tso, Pei-Lum Chang, Hung-Chieh 張弘杰
author	Chang, Hung-Chieh 張弘杰
spellingShingle	Chang, Hung-Chieh 張弘杰 A study on thinning silicon wafer with Ultimate Diamond Disk
author_sort	Chang, Hung-Chieh
title	A study on thinning silicon wafer with Ultimate Diamond Disk
title_short	A study on thinning silicon wafer with Ultimate Diamond Disk
title_full	A study on thinning silicon wafer with Ultimate Diamond Disk
title_fullStr	A study on thinning silicon wafer with Ultimate Diamond Disk
title_full_unstemmed	A study on thinning silicon wafer with Ultimate Diamond Disk
title_sort	study on thinning silicon wafer with ultimate diamond disk
publishDate	2009
url	http://ndltd.ncl.edu.tw/handle/99825357804062132700
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A study on thinning silicon wafer with Ultimate Diamond Disk

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