A Tunable Range/Sensitivity CMOS-MEMS Capacitive Tactile Sensor with Polymer Fill-In Technique
碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 97 === In this study, a capacitive type CMOS-MEMS tactile-sensor containing a sensing gap filled with polymer. The fabrication process allows the changing of polymer material easily. Thus, the characteristics (sensing range, sensitivity) of the CMOS-MEMS tactile-sen...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46016036712374587099 |