Investigation of GaN-Based Hydrogen Sensors with Porous Sensing Metal and Nanoparticles

碩士 === 國立臺灣海洋大學 === 電機工程學系 === 97 === In this thesis, a series of high-performance GaN based Schottky metal-semiconductor-metal hydrogen sensors, including fundamental Pd sensor, mixture-type sensor, and nano-scale-type sensor are fabricated and studied. Pd is employed as sensing metal due to its ex...

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Bibliographic Details
Main Authors: Kun-Chieh Liang, 梁昆傑
Other Authors: Wen-Shiung Lour
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/73601763618459426765