Electrostatic In-plane Comb-drive Rotational Platforms, 1-D Vertical Electrothermal Actuators, and Multiple DOFs MEMS Gripper Fabricated by the MetalMUMPs Process
碩士 === 國立臺灣大學 === 光電工程學研究所 === 97 === Micro-Electro-Mechanical System(MEMS) is the technology which integrate the optics, mechanics, electronics, materials, control, chemicals, physicals, and biomedical, and optoelectronics techniques to fabricate micro-scale mechanical elements. With the technology...
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| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59971916215198606313 |