| Summary: | 碩士 === 國立臺灣大學 === 物理研究所 === 97 === THz wave is the electromagnetic wave whose frequency lies between infrared and microwave. Its frequency is about 1012Hz. Recently, THz wave was discovered having great applications in astrophysics, earth science, chemistry, biomedicine, physics, security. For lacking reliable sources and sensors, the applications in THz wave is not extensively explored, so many research on THz region was conducted recently.
We try to design the 28.3THz sensor using CMOS 0.18μm process. The main purpose for choosing the CMOS process is its mass production and cheapness. The sensor we designed is electric-thermal type. The antenna in it couples the 28.3THz electromagnetic wave into the p-island resistor of the BJT and thus heats it up. Then, a thermal sensing circuit is designed to sense the temperature of the BJT. Its output voltage increases with increasing temperature. We use the thermal sensing circuit to replace the special material in antenna coupled bolometer in other process which the CMOS process does not provide.
In the thesis, using HFSS to design the antenna, using ePhysics to simulate the temperature distribution of the chip which is illuminated with laser, the package, the measurement system setup, and the measurement result are shown. Finally, we got the spatial response pictures of the chip for two different laser polarizations.
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