Development of plastic molds and imprinted materials for micro/nano imprint lithography
碩士 === 國立高雄大學 === 化學工程及材料工程學系碩士班 === 97 === The study focusing on the development of nano/micro imprinting techniques and their applications included three major parts: fabrication of imprinted molds, development of alternative imprinting process, and design of imprintable materials. Two imprinting...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/39720775600011730199 |