The Study of ZnO thin film gas sensors activation by UV light

• Main Authors: Kuan-Ting Chen, 陳冠廷
• Other Authors: Wen-How Lan
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/65272214137911850271

碩士 === 國立高雄大學 === 電機工程學系--先進電子構裝技術產業研發碩 === 97 === In this dissertation, the nano structured Zinc Oxide (ZnO) was achieved by the thermally evaporated Zinc (Zn) on sapphire substrate followed by suitable thermal treatment. The resistance for the film was studied under different oxygen and nitrogen gas conditions and ultra violet light illumination. The response and recovery time for the film with different conditions was studied. The mechanism was discussed with the surface morphology study and the corresponded physical models. Under the pulse light modulation and the followed signal process, applications with short response and recovery time can be achieved.