Development of a Measurement System Using Dual-Beam Laser Interferometer for Precision Machine Tools

• Main Authors: I-Ching Chen, 陳怡靜
• Other Authors: 覺文郁
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/29h3r5

碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 97 === A measurement system using a dual-beam laser interferometer for the calibration of precision machine tools is presented in this paper, which includes an angular error measurement module and a squareness error measurement module. It realizes a new structure of the non–contact optical measurement with the high accuracy. By using the optical instrument with high resolution, this measurement system can can resist the magnetic interference to be applied in various fields. Meanwhile, it is characterized by high accuracy, wide measurement range, low cost, ease to carry, simple installation and rapid measurement. The angular measurement module is composed of a dual-beam laser interferometer, corner cubes and plane mirrors. When the angular error of a machine tools occurs, the pitch error and yaw error can be measured by the change of optical path. The standard deviation measured by this system can be less than 0.9 arcsec and which measured by HP system is 1.2 arcsec. The squareness measurement module was composed of a dual-beam laser interferometer, plane mirrors and a straightness reflector. The squareness error can be obtained by comparing the slope of the straight errors. The squareness error measured by this system can achieve 6.0 arcsec, which is 10.7 arcsec by HP system and 197.1 arcsec by Grid Encoder.