| Summary: | 碩士 === 國立虎尾科技大學 === 材料科學與綠色能源工程研究所 === 97 === The first part of this study is to discuss the properties of CBD-prepared zinc oxide films. The second part is to elucidate the properties of manganese-doped zinc oxide prepared by an optimum deposition parameter.
Zinc oxide thin films with low resistivity and high transparency were prepared on cleaned Corning Eagle2000 glass substrates by chemical bath deposition (CBD); and the effects of deposition parameters on the structural, electrical and optical properties of the films were investigated. The changes in structure, resistivity, and transmittance were studied using Hall measure system (HMS), x-ray diffraction (XRD), Field emission scanning electron mictoscope (FE-SEM), Atomic Force Microscope(AFM), and spectrophotometer (UV-Vis), respectively. The electrical and optical properties of the thin film had a resistivity of 2.91×10-2 Ωcm, transmittance of 81.2％, and bandgap energy of 3.23 eV in the visible range when the film was annealed in Ar+H2.
Manganese-Doped Zinc Oxide was prepared by an optimum deposition parameter using Chemical Bath Deposition (CBD); and the effect of manganese-doped content on the structural, electrical, optical, and magnetic properties of the film were also investigated. The electrical, optical and magnetic properties of the thin film had a resistivity of 5.84×10-2 Ωcm, transmittance of 75.6％, bandgap energy of 3.30 eV in the visible range, saturation magnetization of 21 emu/c.c., remanent magnetization of 2.605 emu/c.c., and coercivity of 45.6979 Oe when the film (Mn=4.02 at.%) was annealed in Ar+H2. The results revealed that a superior zinc-based oxide film can be prepared using chemical bath deposition by carefully adjusting the manganese-doped content, which make the process potential to be used on a roll-to-roll-process.
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