Study of Carbon Nanotube Network (CNTN) Synthesized by Alcohol Catalytic Chemical-Vapor-Deposition as Interconnect of Advanced Metal-Oxide-Semiconductor Devices
碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 97 === In this thesis, the synthesizing high-quality carbon nanotube network (CNTN) has been developed directly by means of the low-temperature catalytic CVD method using ethanol (ACCVD). A metal acetate solution was prepared by dissolving molybdenum acetate and co...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64h8k5 |