Development of a low-cost measurement system by using position sensing detector for the precision machine

• Main Authors: Chih-Ming Pan, 潘志銘
• Other Authors: 覺文郁
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/2vc6n6

碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 97 === With the progress of technology, products are getting miniaturized such that the precision of tool machines has to be improved. Conventional measurement instruments such as laser interferometers and autocollimators are expensive and time-consuming in measurement. In this research, the measurement system with high-precision, low-cost and high measurement speed is developed to be applied to the measurement of tool machines such as the multi-axis machine tools, the coordinate measuring machine (CMM), the indexing table and other tools. The planar QD measurement system utilizes 16 QDs and the light source by Laser to establish the correction system of precision tool machines. In this study, a circuit module is also realized to replace commercial signal processor of positioning sensors to construct a measurement system with simple operation, high-precision, and low-cost. From the experimental results, the accuracy of the system is better than 1μm. Laser-array based planar measurement system is constructed by 27 Laser diodes and 3 position sensor devices (PSD). The structure can augment the measurement range by increasing the number of Laser sources. It can increase by times the measurement range of the entire system and can be applied to 3-D spatial position measurement and 3-D spatial trajectory tracking measurement. From the experimental results, the accuracy of the measurement system can be under 1μm. The 6-DOF indexing performance measurement system consists of 3 PSDs and a laser tower which includes 12 laser diodes and a fixture are installed to be used in the measurement of any type of rotary tables. With this system, the precision of indexing performance can be increased by adding more laser diodes. The experimental results show that the measurement accuracy of this system can attain at least up to 1 arc sec.