Combined Fenton oxidation and biological process for treating PEG-containing wastewater from chemical mechanical polishing process

碩士 === 淡江大學 === 水資源及環境工程學系碩士班 === 97 === PEG (Polyethylene glycol) is applied extensively in the manufacturing process of solar panels as liquid lubricant. Due to recalcitrant and hydrophilic characteristics of PEG, wafer factory are constantly struggle of meeting discharge limit for COD. COD value...

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Bibliographic Details
Main Authors: Jie-Yuan Chen, 陳玠源
Other Authors: chi-wang Li
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/81253004932931984627
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Summary:碩士 === 淡江大學 === 水資源及環境工程學系碩士班 === 97 === PEG (Polyethylene glycol) is applied extensively in the manufacturing process of solar panels as liquid lubricant. Due to recalcitrant and hydrophilic characteristics of PEG, wafer factory are constantly struggle of meeting discharge limit for COD. COD value of the dicharge wastewater can reach as high as 1000~1500 mg/L and is much higher the effluents standard of 100 mg/L set by Taiwan EPA. Although wafer factories have assessed many physico-chemical and biological processes for wastewater treatment, treatment efficiencies of these processes are not as promising as they expect. In addition, the processes can’t be applied for actual operation because of the economic considerations. Past studies showed that PEG can be degraded by using advanced oxidation processes such as wet oxidation WAO and H2O2/UV. The advanced oxidation processes can not only mineralize but also increase the biodegradability of PEG; however, these AOPs are too energy-consuming to be practically employed in actual treatment. Thus, this study would adopt Fenton process to oxidize PEG, taking the advantages of Fenton such as low energy consumption and easy operation. Hydroxyl radicals generated from Fenton would oxidize PEG’s molecular bond, achieving the same effect as WAO without the energy-consuming problem of WAO process. After PEG treated by Fenton, its biological degradability indicated by BOD/COD ratio significantly increased from 0 to 0.5. The result showed that after Fenton pretreatment PEG can be degraded by aerobic biological treatment, and Fenton process followed by aerobic biological treatment can be an effective solution for wafer factory effluents with excessively high COD value.